Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication

by Maks Gepner | Jul 2, 2008 | PDFs

Solid State Electronics 2008
Y. Li, W. Parkes, L.I. Haworth, A.A. Stokes, K.R. Muir, P. Li, A.J. Collin, N.G. Hutcheon, R. Henderson, B. Rae and A.J. Walton