Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

by Maks Gepner | Jun 5, 2012 | PDFs

IEEE Transactions on Semiconductor Manufacturing, 2012
Yifan Li, Member, Richard Yongqing Fu, D. Winters, Brian W. Flynn, Bill Parkes, Douglas Stuart Brodie, Yufei Liu, Jonathan Terry, Les I. Haworth, A. S. Bunting, J. T. M. Stevenson, Stewart Smith, C. Logan Mackay, Pat R. R. Langridge-Smith, Adam A. Stokes, Anthony J. Walton